Semiconductor devices including through-silicon via

ABSTRACT

Semiconductor devices, and methods of fabricating a semiconductor device, include forming a via hole through a first surface of a substrate, the via hole being spaced apart from a second surface facing the first surface, forming a first conductive pattern in the via hole, forming an insulating pad layer on the first surface of the substrate, the insulating pad having an opening exposing the first conductive pattern, performing a thermal treatment on the first conductive pattern to form a protrusion protruding from a top surface of the first conductive pattern toward the opening, and then, forming a second conductive pattern in the opening.

CROSS-REFERENCE TO RELATED APPLICATIONS

This U.S. non-provisional patent application is a divisional applicationof U.S. application Ser. No. 14/094,963, filed on Dec. 3, 2013, whichclaims the benefit of priority under 35 U.S.C. §119 to Korean PatentApplication No. 10-2012-0140996, filed on Dec. 6, 2012, in the KoreanIntellectual Property Office, the entire contents of each of which areherein incorporated by reference.

BACKGROUND

1. Field

Example embodiments of the inventive concepts relate to semiconductordevices and/or methods of fabricating the same, and in particular, tosemiconductor devices with through-silicon vias and/or methods offabricating the same.

2. Description of Related Art

There is a growing trend to fabricate lightweight, small-sized, highspeed, multifunctional, high performance, and low-cost electronicsystems. In response to such a trend, multi-chip stacked packagetechniques and/or system in package techniques have been proposed. Inthe multi-chip stacked package or the system in package, one or moresemiconductor devices may perform one or more functions in a singlesemiconductor package. The multi-chip stacked package or the system inpackage may have a thicker thickness as compared to a single chippackage but have a similar size to the single chip package in terms of aplanar surface area or ‘footprint’. Thus, the multi-chip stacked packageor the system in package may be used in small electronic devices such asmobile devices with high performance requirements, for example, mobilephones, notebook computers, memory cards, and/or portable camcorders.

The multi-chip stacked package or the system in package may be realizedusing a through-silicon via (TSV) technology. A through-silicon via mayaffect performance of the semiconductor device.

SUMMARY

Example embodiments of the inventive concepts provide a semiconductordevice with improved electric characteristics.

Other example embodiments of the inventive concepts provide a method offabricating a semiconductor device with improved electriccharacteristics.

According to example embodiments of the inventive concepts, asemiconductor device may include a substrate having a first surface anda second surface facing each other, a through-silicon via provided in avia hole penetrating the substrate, an integrated circuit spaced apartfrom the through-silicon via, the integrated circuit being on the firstsurface of the substrate, a first pad connected to the through-siliconvia, the first pad being on the first surface of the substrate, and asecond pad connected to the through-silicon via, the second pad being onthe second surface of the substrate. The through-silicon via may includea first conductive pattern filling the via hole and a protrusionextending from the first conductive pattern into the first pad.

In example embodiments, the first pad may be in contact with theprotrusion.

In example embodiments, the first pad may include a recess regionextending from a bottom surface of the first pad toward a top surface ofthe first pad, and the protrusion may be in contact with the recessregion of the first pad.

In example embodiments, a width of the recess region decreases withincreasing distance from the bottom surface of the first pad.

In example embodiments, the device may further include an interlayereddielectric layer on the first surface of the substrate to cover theintegrated circuit. The via hole penetrates the interlayered dielectriclayer, and the first pad may be on the interlayered dielectric layer.

In example embodiments, the recess region may extend to the top surfaceof the first pad, and the protrusion penetrates the first pad.

In example embodiments, the protrusion has a top surface coplanar withthe top surface of the first pad.

In example embodiments, the protrusion has a top surface lower than thetop surface of the first pad, and the protrusion may be in contact withthe recess region.

According to example embodiments of the inventive concepts, a method offabricating a semiconductor device includes forming a via hole through afirst surface of a substrate, the via hole being spaced apart from asecond surface facing the first surface, forming a first conductivepattern in the via hole, forming an insulating pad layer on the firstsurface of the substrate, the insulating pad layer having an openingexposing the first conductive pattern, performing a thermal treatment onthe first conductive pattern to form a protrusion protruding from a topsurface of the first conductive pattern toward the opening, and forminga second conductive pattern in the opening.

In example embodiments, the thermal treatment may be performed at atemperature of about 300° C.-500° C., or at a temperature of about 400°C. or more.

In example embodiments, the forming of a second conductive pattern mayinclude forming a second conductive layer in the opening, andplanarizing the second conductive layer to expose the insulating padlayer. The second conductive pattern may have a top surface coplanarwith a top surface of the insulating pad layer.

In example embodiments, the thermal treatment may be performed in such away that the protrusion has a top surface higher than the top surface ofthe insulating pad layer.

In example embodiments, the planarizing the second conductive layer maybe performed in such a way that the protrusion has a top surfacecoplanar with the top surface of the insulating pad layer.

In example embodiments, the method may further include forming anintegrated circuit on the first surface of the substrate, the integratedcircuit being spaced apart from the via hole, before the forming a viahole, and then, forming an interlayered dielectric layer to cover theintegrated circuit. The via hole may be formed to penetrate theinterlayered dielectric layer, and the insulating pad layer may beformed on the interlayered dielectric layer.

In example embodiments, the method may further include etching thesecond surface of the substrate to expose a bottom surface of the firstconductive pattern, and forming a pad on the second surface of thesubstrate, the pad being connected to the bottom surface of the firstconductive pattern.

According to example embodiments, a method of fabricating asemiconductor device, includes forming a first conductive pattern in avia hole, the via hole penetrating a substrate, forming an insulatingpad layer over the substrate, the insulating pad layer exposing thefirst conductive pattern, exerting a compressive stress on the firstconductive pattern exposed by the insulating pad layer to form aprotrusion protruding from the first conductive pattern, and forming asecond conductive pattern contacting the protrusion.

The method may further include forming at least one interlayereddielectric layer on the substrate, prior to the forming a firstconductive pattern, wherein the via hole penetrates the at least oneinterlayered dielectric layer, and the exerting a compressive stress mayinclude performing a thermal treatment process so as to cause metallicelements in the first conductive pattern to extrude above the at leastone interlayered dielectric layer.

The method may further include performing a preliminary thermaltreatment process on the first conductive pattern so as to induce growthof metal grains in the first conductive pattern, prior to the forming aninsulating pad layer. The thermal treatment process may be performed ata higher temperature than the preliminary thermal treatment process.

The forming a second conductive pattern may include forming a secondconductive layer over the insulating pad layer and the protrusion, abottom surface of the second conductive layer having a recess with aprofile corresponding to a profile of the protrusion, and planarizingthe second conductive layer to form the second conductive patternexposing an upper surface of the insulating pad layer.

The thermal treatment process may cause the metallic elements in thefirst conductive pattern to extrude above the insulating pad layer, andthe planarizing the second conductive layer to form the secondconductive pattern may include forming the second conductive pattern soas to expose an upper surface of the protrusion.

BRIEF DESCRIPTION OF THE DRAWINGS

Example embodiments will be more clearly understood from the followingbrief description taken in conjunction with the accompanying drawings.The accompanying drawings represent non-limiting, example embodiments asdescribed herein.

FIGS. 1 through 9 are sectional views illustrating a method offabricating a semiconductor device, according to an example embodimentof the inventive concepts.

FIG. 10 is a sectional view of a semiconductor device, according to anexample embodiment of the inventive concepts.

FIG. 11 is a sectional view of a semiconductor device, according toanother example embodiment of the inventive concepts.

FIGS. 12 through 14 are sectional views illustrating semiconductorpackages, according to example embodiments of the inventive concepts.

FIG. 15 is a plan view of a package module according to an exampleembodiment of the inventive concepts.

FIG. 16 is a schematic block diagram illustrating a memory card,according to an example embodiment of the inventive concepts.

FIG. 17 is a schematic block diagram illustrating an electronic system,according to an example embodiment of the inventive concepts.

FIG. 18 shows a mobile device, which is presented as an example of theelectronic system of FIG. 17.

It should be noted that these figures are intended to illustrate thegeneral characteristics of methods, structure and/or materials utilizedin certain example embodiments and to supplement the written descriptionprovided below. These drawings are not, however, to scale and may notprecisely reflect the precise structural or performance characteristicsof any given example embodiment, and should not be interpreted asdefining or limiting the range of values or properties encompassed byexample embodiments. For example, the relative thicknesses andpositioning of molecules, layers, regions and/or structural elements maybe reduced or exaggerated for clarity. The use of similar or identicalreference numbers in the various drawings is intended to indicate thepresence of a similar or identical element or feature.

DETAILED DESCRIPTION

Various example embodiments will now be described more fully withreference to the accompanying drawings in which some example embodimentsare shown. However, specific structural and functional details disclosedherein are merely representative for purposes of describing exampleembodiments, and thus may be embodied in many alternate forms and shouldnot be construed as limited to only example embodiments set forthherein. Therefore, it should be understood that there is no intent tolimit example embodiments to the particular forms disclosed, but on thecontrary, example embodiments are to cover all modifications,equivalents, and alternatives falling within the scope of thedisclosure.

Although the terms first, second, etc. may be used herein to describevarious elements, these elements should not be limited by these terms.These terms are only used to distinguish one element from another. Forexample, a first element could be termed a second element, and,similarly, a second element could be termed a first element, withoutdeparting from the scope of example embodiments. As used herein, theterm “and/or” includes any and all combinations of one or more of theassociated listed items.

It will be understood that, if an element is referred to as being ibevarious elements, these elements should not be limited by these terms.These terms are only used to distinguish one element from another. ForeIn contrast, if an element is referred to as being ed to as being ibevarious elements, these elements shouldent, there are no interveningelements present. Other words used to describe the relationship betweenelements should be interpreted in a like fashion (e.g., “between” versus“directly between,” “adjacent” versus “directly adjacent,” etc.).

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of exampleembodiments. As used herein, the singular forms be the relati “the” areintended to include the plural forms as well, unless the context clearlyindicates otherwise. It will be further understood that the terms e ofdescribing particng,r embodiments only and is not intended to belimiting of example embodiments. Afeatures, integers, steps, operations,elements and/or components, but do not preclude the presence or additionof one or more other features, integers, steps, operations, elements,components and/or groups thereof.

Spatially relative terms (e.g., at the terms tures, integers, steps,operations, elements, components and/or groups thereof.fy the presenceof stated features, integers, steps, operations, elements and/orcomponen mor feature as illustrated in the figures. It will beunderstood that the spatially relative terms are intended to encompassdifferent orientations of the device in use or operation in addition tothe orientation depicted in the figures. For example, if the device inthe figures is turned over, elements described as “below” or “beneath”other elements or features would then be oriented “above” the otherelements or features. Thus, for example, the term “below” can encompassboth an orientation that is above, as well as, below. The device may beotherwise oriented (rotated 90 degrees or viewed or referenced at otherorientations) and the spatially relative descriptors used herein shouldbe interpreted accordingly.

Example embodiments are described herein with reference tocross-sectional illustrations that are schematic illustrations ofidealized embodiments (and intermediate structures). As such, variationsfrom the shapes of the illustrations as a result, for example, ofmanufacturing techniques and/or tolerances, may be expected. Thus,example embodiments should not be construed as limited to the particularshapes of regions illustrated herein but may include deviations inshapes that result, for example, from manufacturing. For example, animplanted region illustrated as a rectangle may have rounded or curvedfeatures and/or a gradient (e.g., of implant concentration) at its edgesrather than an abrupt change from an implanted region to a non-implantedregion. Likewise, a buried region formed by implantation may result insome implantation in the region between the buried region and thesurface through which the implantation may take place. Thus, the regionsillustrated in the figures are schematic in nature and their shapes donot necessarily illustrate the actual shape of a region of a device anddo not limit the scope.

It should also be noted that in some alternative implementations, thefunctions/acts noted may occur out of the order noted in the figures.For example, two figures shown in succession may in fact be executedsubstantially concurrently or may sometimes be executed in the reverseorder, depending upon the functionality/acts involved.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which example embodiments belong. Itwill be further understood that terms, such as those defined in commonlyused dictionaries, should be interpreted as having a meaning that isconsistent with their meaning in the context of the relevant art andwill not be interpreted in an idealized or overly formal sense unlessexpressly so defined herein.

A method of fabricating a semiconductor device according to an exampleembodiment of the inventive concepts will be described with reference tosectional views of FIGS. 1 through 9.

Referring to FIG. 1, provided is a substrate 10 having a first surface11 and a second surface 12 facing each other. In example embodiments,the substrate 10 may be, for example, a p-type silicon wafer.

An integrated circuit 15 may be formed on the first surface 11 of thesubstrate 10. The integrated circuit 15 may include a switching element,a capacitor, a resistor, or a vertical memory cell. The switchingelement may be, for example, a diode, an NMOS transistor, a PMOStransistor, or a bipolar transistor. The vertical memory cell mayinclude a vertical pillar vertically extending from the substrate 10 anda memory element coupled to the vertical pillar.

A first interlayered dielectric layer 20 may be formed on the firstsurface 11 of the substrate 10 to cover the integrated circuit 15. Thefirst interlayered dielectric layer 20 may include a silicon oxidelayer. A first contact 22 may be formed through the first interlayereddielectric layer 20. The first contact 22 may be formed of, for example,aluminum or tungsten. The first contact 22 may be connected to a dopedregion of the integrated circuit 15 (e.g., source/drain regions of MOStransistor). An etch stop layer 24 may be formed on the firstinterlayered dielectric layer 20. The etch stop layer 24 may include asilicon nitride layer.

A mask pattern (not shown) may be formed on the etch stop layer 24. Themask pattern (not shown) may be used to etch the etch stop layer 24, thefirst interlayered dielectric layer 20, and the substrate 10 and to forma via hole 21. The via hole 21 may be formed by a drilling process, aBosch etching process, or a steady-state etching process. The via hole21 may be formed to penetrate the etch stop layer 24 and the firstinterlayered dielectric layer 20 and extend from the first surface 11 ofthe substrate 10 toward the second surface 12. The via hole 21 may betoo shallow to penetrate the substrate 10. The via hole 21 may be formedto have a depth of about 50 μm or more. However, the depth of the viahole 21 may be changed depending on a design rule or a specific devicerequirement.

Referring to FIG. 2, a via-hole insulating layer 32 may be formed in thevia hole 21. The via-hole insulating layer 32 may be formed bydepositing an insulating material, such as, a silicon oxide layer or asilicon nitride layer. The via-hole insulating layer 32 may beconformally deposited on an inner surface of the via hole 21. Thevia-hole insulating layer 32 may extend over the first interlayereddielectric layer 20. The via-hole insulating layer 32 may be formedusing, for example, an atomic layer deposition or a chemical vapordeposition.

A first barrier layer 34 may be formed on the via-hole insulating layer32. The first barrier layer 34 may be formed to cover the inner surfaceof the via hole 21 and extend over the first surface 11. The firstbarrier layer 34 may include titanium, titanium nitride, tantalum,tantalum nitride, ruthenium, cobalt, manganese, tungsten nitride,nickel, nickel boride, or a double layer of titanium/titanium nitride.The first barrier layer 34 may be formed by a sputtering process. Thefirst barrier layer 34 may be formed at a temperature of about 375° C.The first barrier layer 34 may be configured to prevent metallicelements in a first conductive layer 36, which will be formed in asubsequent process, from diffusing into the substrate 10.

The first conductive layer 36 may be formed on the first barrier layer34 to fill the via hole 21. The first conductive layer 36 may extendover the first surface 11. The first conductive layer 36 may be formedusing an electroplating process, an electroless plating process, or aselective deposition process. The electroplating process may includeforming a seed layer (not shown) on the inner surface of the via hole 21provided with the first barrier layer 34, and then, plating the seedlayer with a conductive layer. In example embodiments, the firstconductive layer 36 may be formed at room temperature (or,alternatively, about 21° C.). The seed layer may be a copper layer,which may be formed by a sputtering process. The conductive layer 34 maybe a metal layer. For example, the metal layer may include silver, gold,copper, tungsten, or indium. In example embodiments, the electroplatingprocess may be performed by dipping the substrate into electrolyticsolution containing CuSO₄, H₂SO₄, and Cl.

After the formation of the first barrier layer 34 and the firstconductive layer 36, a first thermal treatment process may be performed.The first thermal treatment process may be performed at a temperature ofabout 100-500° C. The first thermal treatment process may be performedto induce growth of metal grains in the first conductive layer 36.

Referring to FIG. 3, the first conductive layer 36 may be planarized toexpose the etch stop layer 24. Here, the first barrier layer 34 and thevia-hole insulating layer 32 may be removed from a top surface of theetch stop layer 24. As the result of the planarization, athrough-silicon via (TSV) with a first barrier pattern 33 and a firstconductive pattern 35 may be formed in the via hole 21. Thereafter, theetch stop layer 24 may be removed. In example embodiments, a thermaltreatment process may be additionally performed. Thermal treatmentprocess may be performed at a temperature of about 100-500° C.

Referring to FIG. 4, an insulating pad layer 26 may be formed on thefirst interlayered dielectric layer 20. The insulating pad layer 26 maybe formed to have first and second openings 27 and 28 exposing thethrough-silicon via (TSV) and the first contact 22, respectively. Widthsof the first and second openings 27 and 28 may be greater than widths ofthe through-silicon via (TSV) and the first contact 22, respectively. Inexample embodiments, the insulating pad layer 26 may include a siliconoxide layer. In other example embodiments, the insulating pad layer 26may include SiCN, SiCOH, and SiON layers that are sequentially stackedon the first interlayered dielectric layer 20.

Referring to FIG. 5, a second thermal treatment process may be performedat a temperature that is higher than that of the first thermal treatmentprocess. For example, the second thermal treatment process may beperformed at a temperature of about 300-500° C. In the case where thefirst conductive pattern 35 is formed of a different material (e.g.,copper) from the substrate (e.g., made of silicon), a difference inthermal expansion coefficient therebetween may produce a compressivestress to be exerted to the first conductive pattern 35. Accordingly,metallic elements of the first conductive layer 36 may expand andextrude. For example, as the result of the extrusion of the firstconductive pattern 35, a protrusion 37 may be formed in the firstopening 27. The protrusion 37 may be protruded from a top of the firstconductive pattern 35 into the first opening 27, and thus, theprotrusion 37 may have a top surface that is higher than that of theinsulating pad layer 26.

Referring to FIG. 6, a second conductive layer 40 may be formed on theinsulating pad layer 26 to fill the first and second openings 27 and 28.The second conductive layer 40 may be formed using a process similar tothat for the first conductive layer 36. Before the formation of thesecond conductive layer 40, a second barrier layer (not shown) and aseed layer (not shown) may be additionally formed. In the first opening27, the second conductive layer 40 may have a recess region 41 that is aconcave portion formed from a bottom surface thereof toward a topsurface thereof. The recess region 41 may be formed to have a profilecorresponding to that of the protrusion 37. The protrusion 37 may be incontact with the recess region 41 of the second conductive layer 40.

Referring to FIG. 7, the second conductive layer 40 may be planarized toform a second conductive pattern exposing the insulating pad layer 26.The second barrier layer (not shown) may be planarized to form a secondbarrier pattern. As the result of the planarization, a first pad 43 maybe formed in the first opening 27 and a second pad 45 may be formed inthe second opening 28. The first pad 43 may be in contact with thethrough-silicon via (TSV), and the second pad 45 may be in contact withthe first contact 22. Each of the first and second pads 43 and 45 mayinclude the second conductive pattern and the second barrier pattern(not shown). The first and second pads 43 and 45 may have top surfacesthat are coplanar with that of the insulating pad layer 26.

In example embodiments, the protrusion 37 may be planarized during theplanarization process. Accordingly, the protrusion 37 may have the topsurface that is coplanar with that of the first pad 43. Further, therecess region 41 and the protrusion 37 may be exposed through a topsurface of the first pad 43.

Referring to FIG. 8, a second interlayered dielectric layer 50 may beformed on the insulating pad layer 26. The second interlayereddielectric layer 50 may include a silicon oxide layer. The secondinterlayered dielectric layer 50 may be formed by a CVD process. Forexample, the second interlayered dielectric layer 50 may be a TEOS oxidelayer. The second interlayered dielectric layer 50 may be formed at atemperature of about 400° C.

A second contact 52 may be formed in the second interlayered dielectriclayer 50. The formation of the second contact 52 may include patterningthe second interlayered dielectric layer 50 to form openings exposingthe first and second pads 43 and 45, and then, filling the opening withaluminum or tungsten.

A third pad 63 may be formed on the second interlayered dielectric layer50. The third pad 63 may be connected to the second contact 52.Thereafter, a first passivation layer 61 may be formed to cover thesecond interlayered dielectric layer 50 and expose a portion of thethird pad 63. The first passivation layer 61 may be formed of a materialcapable of protecting the integrated circuit 15 against externalpollution and environmental stress. For example, the first passivationlayer 61 may include at least one of silicon oxide or silicon nitride.The third pad 63 may be formed of aluminum or copper.

Referring to FIG. 9, the second surface 12 of the substrate 10 may bepolished or ground. Accordingly, the through-silicon via (TSV) may beexposed through the ground second surface 12. The grinding process willbe described in more detail below.

Firstly, a carrier (not shown) may be attached on the first passivationlayer 61 of the substrate 10 using an adhesive layer (not shown). Thecarrier may be configured to relieve a mechanical stress, which may beexerted to the substrate 10 in the grinding process, and to prevent athinned substrate 10 from being deformed after the grinding process. Inexample embodiments, the carrier may include a glass substrate or aresin substrate. The adhesive layer may include an ultraviolet adhesiveor a thermoplastic adhesive. Next, the second surface 12 of thesubstrate 10 may be polished to expose the via-hole insulating layer 32.The polishing of the substrate 10 may be performed by, for example, agrinding process, in which each or at least one of a CMP process, anetch-back process, and a spin-etch process is used.

Thereafter, the substrate 10 may be selectively etched in such a waythat a bottom portion of the through-silicon via (TSV) is protruded fromthe second surface 12 of the substrate 10. The selective etching of thesubstrate 10 may be performed by a wet etching process or a dry etchingprocess, in which the substrate 10 is etched with a higher etch ratethan the via-hole insulating layer 32. For example, if the via-holeinsulating layer 32 is a silicon oxide layer, SF₆ etching gas may beused to etch selectively the substrate 10.

A second passivation layer 62 may be formed on the polished surface ofthe second surface 12. An etching process may be performed to removepartially the second passivation layer 62 and the via-hole insulatinglayer 32 and expose the through-silicon via (TSV). A fourth pad 65 maybe formed on the second passivation layer 62 and be connected to thethrough-silicon via (TSV). The second passivation layer 62 may includeat least one of silicon oxide or silicon nitride. The fourth pad 65 maybe formed of, for example, copper.

Hereinafter, the semiconductor device according to an example embodimentof the inventive concepts will be described with reference to FIG. 9.

Referring to FIG. 9, a semiconductor device 101 may include thethrough-silicon via (TSV) penetrating the substrate 10.

The substrate 10 may have the first surface 11 and the second surface 12facing each other. The substrate 10 may be, for example, a p-typesilicon wafer. The integrated circuit 15 may be formed or integrated onthe first surface 11 of the substrate 10. The integrated circuit 15 mayinclude a switching element, a capacitor, a resistor, or a verticalmemory cell. The switching element may be, for example, a diode, an NMOStransistor, a PMOS transistor, or a bipolar transistor. The verticalmemory cell may include a vertical pillar vertically extending from thesubstrate 10 and a memory element coupled to the vertical pillar.

The first interlayered dielectric layer 20 may be formed on the firstsurface 11 of the substrate 10 to cover the integrated circuit 15. Thefirst interlayered dielectric layer 20 may include a silicon oxidelayer. The first contact 22 may penetrate the first interlayereddielectric layer 20. The first contact 22 may be formed of, for example,aluminum or tungsten. The first contact 22 may be connected to a dopedregion of the integrated circuit 15 (e.g., source/drain regions of MOStransistor).

The through-silicon via (TSV) may be formed in the via hole 21 that isformed to penetrate the substrate 10 and the first interlayereddielectric layer 20. The via-hole insulating layer 32 may be providedbetween sidewalls of the through-silicon via (TSV) and the via hole 21.The via-hole insulating layer 32 may include or be formed of a siliconoxide layer or a silicon nitride layer. In example embodiments, thethrough-silicon via (TSV) may be exposed through both of the first andsecond surfaces 11 and 12 of the substrate 10. The through-silicon via(TSV) may include the first barrier pattern 33 and the first conductivepattern 35. The through-silicon via (TSV) may further include theprotrusion 37 upward protruding from the top surface of the firstconductive pattern 35. The first conductive pattern 35 may include or beformed of a metal layer. The metal layer may include silver, gold,copper, tungsten, or indium. The first barrier pattern 33 may beprovided between the via-hole insulating layer 32 and the firstconductive pattern 35. The first barrier pattern 33 may includetitanium, titanium nitride, tantalum, tantalum nitride, ruthenium,cobalt, manganese, tungsten nitride, nickel, nickel boride, or a doublelayer of titanium/titanium nitride.

The insulating pad layer 26 may be provided on the first interlayereddielectric layer 20. The insulating pad layer 26 may be formed to exposethe through-silicon via (TSV) and the first contact 22.

The first pad 43 and the second pad 45 may be provided on the firstinterlayered dielectric layer 20 and be electrically connected to thethrough-silicon via (TSV) and the first contact 22, respectively. Eachor all of the first pad 43 and the second pad 45 may include the secondconductive pattern and the second barrier pattern. The second conductivepattern may be a metal layer. The metal layer may include silver, gold,copper, tungsten, or indium. The second barrier pattern may includetitanium, titanium nitride, tantalum, tantalum nitride, ruthenium,cobalt, manganese, tungsten nitride, nickel, nickel boride, or a doublelayer of titanium/titanium nitride. In example embodiments, the firstpad 43 may have the recess region 41 extending from a bottom surfacethereof to a top surface thereof. The recess region 41 may have a shapecorresponding to that of the protrusion 37. A width of the recess region41 may decrease with increasing distance from the bottom surface of thefirst pad 43. The protrusion 37 may extend from the first conductivepattern 35 into the first pad 43. The protrusion 37 may be in contactwith the recess region 41 of the first pad 43. For example, theprotrusion 37 may have a top surface that is coplanar with that of thefirst pad 43. The protrusion 37 may penetrate the first pad 43 and beexposed through the top surface of the first pad 43.

The second interlayered dielectric layer 50 may be provided on theinsulating pad layer 26. The second interlayered dielectric layer 50 mayinclude a silicon oxide layer. The second contacts 52 may be formed inthe second interlayered dielectric layer 50. The second contacts 52 maybe connected to the first and second pads 43 and 45, respectively.

The third pad 63 may be formed on the second interlayered dielectriclayer 50. The third pad 63 may be connected to the second contact 52.The first passivation layer 61 may be formed to cover the secondinterlayered dielectric layer 50 and expose a portion of the third pad63. The first passivation layer 61 may be formed of a material capableof protecting the integrated circuit 15 against external pollution andenvironmental stress. For example, the first passivation layer 61 mayinclude at least one of silicon oxide or silicon nitride. The third pad63 may be formed of aluminum or copper.

The second passivation layer 62 may be formed on the second surface 12of the substrate 10. The second passivation layer 62 may be formed toexpose the through-silicon via TSV. The fourth pad 65 may be formed onthe second passivation layer 62 and be connected to the through-siliconvia (TSV). The second passivation layer 62 may include or be formed ofat least one of silicon oxide or silicon nitride. The fourth pad 65 maybe formed of, for example, copper.

A semiconductor device according to an example embodiment of theinventive concepts will be described with reference to a sectional viewof FIG. 10. For the sake of brevity, the elements and features of thisexample that are similar to those previously shown and described willnot be described in much further detail.

Referring to FIG. 10, the protrusion 37 may have a top surface that islower than that of the first pad 43 and is in contact with the recessregion 41. The protrusion 37 may be formed not to penetrate the firstpad 43.

A semiconductor device according to another example embodiment of theinventive concepts will be described with reference to a sectional viewof FIG. 11. For the sake of brevity, the elements and features of thisexample that are similar to those previously shown and described willnot be described in much further detail.

Referring to FIG. 11, the first interlayered dielectric layer 20 may beformed on the first surface 11 of the substrate 10 to cover theintegrated circuit 15. The first interlayered dielectric layer 20 mayinclude a silicon oxide layer.

The first contact 22 may be electrically connected to the integratedcircuit 15 through the first interlayered dielectric layer 20. A firstpad 42 may be formed on the first interlayered dielectric layer 20. Thefirst pad 42 may be connected to the first contact 22. The secondinterlayered dielectric layer 50 may be formed to cover the firstinterlayered dielectric layer 20. The second interlayered dielectriclayer 50 may include a silicon oxide layer. The second contact 52 may beelectrically connected to the first pad 42 through the secondinterlayered dielectric layer 50.

The via hole 21 of the semiconductor device 103 may be formed topenetrate the first and third interlayered dielectric layers 20 and 50.The via hole 21 may extend from a top surface of the second interlayereddielectric layer 50 toward the substrate 10.

The through-silicon via (TSV) may be formed to fill the via hole 21. Thethrough-silicon via (TSV) may be exposed through the top surface of thesecond interlayered dielectric layer 50. The through-silicon via (TSV)may extend to the top surface of the second interlayered dielectriclayer 50 that is located opposite the first interlayered dielectriclayer 20. The via-hole insulating layer 32 may be interposed between thethrough-silicon via (TSV) and the via hole 21.

The second and third pads 43 and 45 may be formed on the secondinterlayered dielectric layer 50. The second pad 43 may be connected tothe through-silicon via (TSV). The third pad 45 may be connected to thesecond contact 52. The second and third pads 43 and 45 may havestructures similar to those in the previous example embodiments. Thefirst passivation layer 61 may be formed to cover the secondinterlayered dielectric layer 50 and expose at least a portion of thesecond and third pads 43 and 45.

The second passivation layer 62 may be formed on the second surface 12of the substrate 10. The fourth pad 65 may be formed on the secondpassivation layer 62 and be connected to the through-silicon via (TSV).The second passivation layer 62 may include at least one of siliconoxide or silicon nitride. The fourth pad 65 may be formed of, forexample, copper.

The semiconductor device shown in of FIG. 11 may be fabricated using aprocess similar to that for the semiconductor device formed in themethod shown in FIGS. 1-9. In the following description, for concisedescription, technical features in a fabricating method that aredifferent from that for the semiconductor device shown in FIGS. 1-9 willbe mainly described below.

As shown in FIG. 11, the formation of the via hole 21 of a semiconductordevice 103 may be performed after forming the second interlayereddielectric layer 50 on the first interlayered dielectric layer 20,unlike the method of the previous example embodiments.

Thereafter, the second and third pads 43 and 45 may be formed on thesecond interlayered dielectric layer 50. The first passivation layer 61may be formed to cover the second interlayered dielectric layer 50 andexpose at least a portion of the second and third pads 43 and 45. Thefirst passivation layer 61 may include or be formed of at least one ofsilicon oxide or silicon nitride.

The second passivation layer 62 may be formed on the second surface 12of the substrate 10. The fourth pad 65 may be formed on the secondpassivation layer 62 and be connected to the through-silicon via (TSV).The second passivation layer 62 may include or be formed of at least oneof silicon oxide or silicon nitride. The fourth pad 65 may be formed of,for example, copper.

In general, after the formation of the through-silicon via and theinterlayered dielectric layer thereon, a metal expansion in thethrough-silicon via (TSV) may occur as the result of a thermal budget.The metal expansion may lead to various technical problems, related toconnectivity between the through-silicon via and an interconnection linethereon. For example, reliability issue, such as an increase in contactresistance, may occur. By contrast, according to example embodiments ofthe inventive concepts, the protrusion may be formed and then removed,after the through-silicon via (TSV), and thus, it is possible to reducetechnical problems related to the protrusion of the through-silicon via.

According to example embodiments of the inventive concepts, the secondthermal treatment process may be performed after the formation of theinsulating pad layer 26, and thus, it is possible to suppresscharacteristics of the integrated circuit from being changed. In otherwords, the insulating pad layer 26 makes it possible to reduce a changein threshold voltage, Vth, of transistors constituting the integratedcircuit, which may be caused by a thermal budget in the second thermaltreatment process. By contrast, if the second thermal treatment processis performed before the formation of the insulating pad layer 26, thetransistors may suffer from a large change in threshold voltage thereof.

FIGS. 12 through 14 are sectional views illustrating semiconductorpackages, according to example embodiments of the inventive concepts.

Referring to FIG. 12, a semiconductor package 401, according to anexample embodiment of the inventive concepts, may include a packagesubstrate 200 and a semiconductor device 100 mounted thereon. Thepackage substrate 200 may be a printed circuit board. The packagesubstrate 200 may include an insulating substrate 201, a redistributedline 215 provided in the insulating substrate 201, conductive patterns211 and 213 provided on top and bottom surfaces, respectively, of theinsulating substrate 201, and package-substrate insulating layers 205and 203 partially covering the conductive patterns 211 and 213. Inexample embodiments, the semiconductor device 100 may be configured tohave substantially the same features as those of one of thesemiconductor devices described with reference to FIGS. 1 through 11.

The semiconductor device 100 may be mounted on the package substrate 200in such a way that the second surface 12 of the substrate 10 faces thepackage substrate 200. The semiconductor device 100 may be electricallyconnected to the package substrate 200 via a first bump 71. A secondbump 73 may be attached on a bottom surface of the package substrate200. The bumps 71 and 73 may be a solder ball, a conductive bump, aconductive spacer, a pin grid array, or any combination thereof. Thesemiconductor package 401 may further include a mold layer 310 coveringthe semiconductor device 100. The mold layer 310 may include or beformed of an epoxy molding compound.

Referring to FIG. 13, a semiconductor package 402, according to anotherexample embodiment of the inventive concepts, may include a firstsemiconductor device 100 and a second semiconductor device 300 that aremounted on the package substrate 200. The package substrate 200 may be aprinted circuit board. The first semiconductor device 100 may beconfigured to have substantially the same features as those of one ofthe semiconductor devices described with reference to FIGS. 1 through11. The second semiconductor device 300 may be a semiconductor device,e.g., a memory or logic chip, that is different from the firstsemiconductor device 100. In example embodiments, the secondsemiconductor device 300 may be configured not to include athrough-silicon via.

The first semiconductor device 100 may be electrically connected to thepackage substrate 200 via the first bump 71. The second semiconductordevice 300 may be mounted on the first semiconductor device 100 in aflip-chip bonding manner. The second semiconductor device 300 may beelectrically connected to the first semiconductor device 100 via a thirdbump 75. The first semiconductor device 100 may be configured to serveas an interposer. In certain embodiments, a space between the thirdbumps 75 may be different from that between the through-silicon vias(TSVs).

The second bump 73 may be attached on a bottom surface of the packagesubstrate 200. The bumps 71, 73, and 75 may be a solder ball, aconductive bump, a conductive spacer, a pin grid array, or anycombination thereof. The semiconductor package 402 may further includethe mold layer 310, which may be formed to cover the first and secondsemiconductor devices 100 and 300. The mold layer 310 may include or beformed of an epoxy molding compound.

Referring to FIG. 14, a semiconductor package 403, according to stillanother example embodiment of the inventive concepts, may include afirst semiconductor device 100 a and a second semiconductor device 100 bthat are mounted on the package substrate 200. The semiconductor package403 may be configured to have the multi-chip package structure. Thefirst semiconductor device 100 a and the second semiconductor device 100b may be configured to be of the same kind and have the same structure.

The package substrate 200 may be a printed circuit board. Each of thefirst and second semiconductor devices 100 a and 100 b may be configuredto have substantially the same features as those of one of thesemiconductor devices described with reference to FIGS. 1 through 11.

The first and second semiconductor devices 100 a and 100 b may include afirst through-silicon via TSVa and a second through-silicon via TSVb,respectively. The first through-silicon via TSVa and the secondthrough-silicon via TSVb may be overlapped with each other in plan view.The first through-silicon via TSVa may be connected to the secondthrough-silicon via TSVb through the third bump 75.

The first semiconductor device 100 may be electrically connected to thepackage substrate 200 via the first bump 71. The first semiconductordevice 100 may be configured to serve as an interposer. The second bump73 may be attached on a bottom surface of the package substrate 200. Thebumps 71, 73, and 75 may be a solder ball, a conductive bump, aconductive spacer, a pin grid array, or any combination thereof. Thesemiconductor package 403 may further include the mold layer 310, whichmay be formed to cover the first and second semiconductor devices 100 aand 100 b. The mold layer 310 may include or be formed of an epoxymolding compound.

According to example embodiments of the inventive concepts describedabove, the packages may be electrically connected to the packagesubstrate via the through-silicon via, but example embodiments of theinventive concepts may not be limited thereto. For example, some of thepads may be electrically connected to the package substrate by bondingwires.

FIG. 15 is a plan view illustrating a package module according anexample embodiment of the inventive concepts.

Referring to FIG. 15, a package module 500 may include a modulesubstrate 502, which may be provided with at least one externalconnection terminal 508. The package module 500 may further include atleast one semiconductor chip 504 and at least one semiconductor package506, for example, a quad-flat-package (QFP) structure, mounted on themodule substrate 502. The semiconductor chip 504 and/or thesemiconductor package 506 may include one or more semiconductor devicesaccording to embodiments of the inventive concepts. The package module500 may be electrically connected to an external electronic device viathe external connection terminal 508.

FIG. 16 is a schematic block diagram illustrating a memory card inaccordance with an example embodiment of the inventive concepts.

Referring to FIG. 16, a memory card 600 may include a controller 620 anda memory 630 in a housing 610. The controller 620 and the memory 630 mayexchange an electric signal with each other. For example, the memory 630and the controller 620 may exchange data with each other according to acommand provided by the controller 620. Thus, the memory card 600 maystore data in the memory 630 or may output data from the memory 630.

The controller 620 and/or the memory 630 may include at least one of thesemiconductor devices or the semiconductor packages in accordance withembodiments of the inventive concepts, for example, described herein.The memory card 600 may be used as a data storage medium for variousportable devices. For example, the memory card 600 may include a multimedia card (MMC) or a secure digital (SD) card.

FIG. 17 is a block diagram illustrating an electronic system inaccordance with an example embodiment of the inventive concepts.

Referring to FIG. 17, an electronic system 700 may include at least oneof the semiconductor devices or the semiconductor packages in accordancewith an example embodiment of the inventive concepts, for example,described herein. The electronic system 700 may include a mobile deviceor a computer. For example, the electronic system 700 may include amemory system 712, a processor 714, a random access memory (RAM) 716,and a user interface 718 that can exchange data with one another using abus 720. The processor 714 may execute a program and/or control theelectronic system 700. The RAM 716 may be used as an operation memory ofthe processor 714. For example, the processor 714 and the RAM 716 mayinclude a semiconductor device or the semiconductor packages inaccordance with example embodiments of the inventive concepts. Theprocessor 714 and the RAM 716 may be included in one package. The userinterface 718 may be used to input data in the electronic system 700 orto output data from the electronic system 700. The memory system 712 maystore program code for performing an operation of the processor 714,data processed by the processor 714, and/or data input from an externalsource. The memory system 712 may include a controller and a memory, andmay be the same as or similar to the memory card 600 of FIG. 16.

The electronic system 700 may be applied to various electronic devices.For example, as shown in FIG. 18, the electronic system 700 can beapplied to a mobile phone 800. According to other example embodiments,the electronic system 700 may be applied to a portable notebook, a MP3player, a navigation system, a solid state disk (SSD), a vehicle, orhome appliances.

According to example embodiments of the inventive concepts, it ispossible to suppress characteristics of the integrated circuit frombeing changed by a thermal treatment process. In addition, thethrough-silicon via can be prevented from being extruded in a subsequentprocess, and thus, it is possible to prevent an interlayered dielectriclayer on the through-silicon via from being cracked and to prevent thethrough-silicon via from being detached from an interconnection linethereon. This makes it possible to reduce a contact resistance of thedevice.

While example embodiments of the inventive concepts have beenparticularly shown and described, it will be understood by one ofordinary skill in the art that variations in form and detail may be madetherein without departing from the spirit and scope of the attachedclaims.

What is claimed is:
 1. A semiconductor device, comprising: a substratehaving a first surface and a second surface facing each other; athrough-silicon via provided in a via hole penetrating the substrate; anintegrated circuit spaced apart from the through-silicon via, theintegrated circuit being on the first surface of the substrate; a firstpad connected to the through-silicon via, the first pad being on thefirst surface of the substrate; and a second pad connected to thethrough-silicon via, the second pad being on the second surface of thesubstrate, wherein the through-silicon via includes a first conductivepattern filling the via hole, and a protrusion extending from the firstconductive pattern into the first pad, the first pad includes a recessregion extending from a bottom surface of the first pad toward a topsurface of the first pad, the protrusion is in contact with the recessregion of the first pad, and the protrusion has a top surface coplanarwith the top surface of the first pad.
 2. The device of claim 1, whereinthe first pad is in contact with the protrusion.
 3. The device of claim1, wherein a width of the recess region decreases with increasingdistance from the bottom surface of the first pad.
 4. The device ofclaim 1, further comprising: an interlayered dielectric layer on thefirst surface of the substrate to cover the integrated circuit, whereinthe via hole penetrates the interlayered dielectric layer, and the firstpad is on the interlayered dielectric layer.
 5. The device of claim 1,wherein, the recess region extends to the top surface of the first pad.